- The CB14 is a small, lightweight pressure switch of simple design, developed specifically for all types of gases essential to semiconductor manufacturing. It is attaches directly to the apparatus. During the manufacturing process, the CB14 went through strict quality controls and performance testing, with special attention paid to cleanliness and air-tightness. This makes it suitable for semiconductor process gas.
- Small and lightweight, the pressure switch is convenient where space is limited.
- Pressure settings are easy to adjust.
- The structure that the microswitch is free from extra stress realizes stable control of process.
- Cleanliness is guaranteed, as the switch was cleaned and assembled in a clean bench (Class 100) or clean room. It is also degreased enough, and processing is oil and water-free＊1. When the product is complete, it is hermetically sealed in dust-free polyethylene bag.
- The gas contact parts of the diaphragm-type is electropolished.