| Type |
M-222LD-H |
M-222LD-D-H |
M-222LD-D-H500 |
| features |
High sensitivity,
& High power |
High sensitivity,
High power,
& dry pump |
High power
& dry pump of 500L |
Quantitative measurement range
(Pa･m3/sec) |
10-13 to 10-3 |
10-12 to 10-3 |
Inlet port
exhaust speed
(He)(L/sec) |
Gross Mode |
1.8 |
2.0 |
2.0 |
| Middle Mode |
4.0 |
4.0 |
4.0 |
| Fine Mode |
7.0 |
7.0 |
7.0 |
| Inlet port size |
NW25(ISO) |
| Main pump |
Type |
Turbo molecular pump |
Pumping speed
(L/sec) |
70 |
| Roughing pump |
Type |
Rotary pump |
Scroll type
dry pump |
Multi stage roots type
dry pump |
Pumping speed
(L/min) |
236 |
250 |
500 |
| External communication interface |
RS-232C
Analog output (2 points)･Standard I/O |
| Display |
4.1 inch Color LCD |
| Sniffer probe |
Option
(Model:981-9371) |
- |
| Electric power |
100VAC, 15A |
100-120VAC, 15A
200-240VAC, 10A |
100-120VAC, 8A |
Dimensions
(W×H×D)(mm) |
462×867×715 |
| Weight(kg) |
75 |
| Conformity with standards |
CE marking, RoHS (Category9) |
RoHS (Category9) |