| Measurement principle |
Heat conduction Pirani, Heat conduction Pirani (impulse Pirani)
|
| Gas dependency |
depending on gas type
|
| Measurement range mbar |
1000 – 1e-4 mbar
|
| Measurement range Torr |
750 – 1e-4 Torr
|
| max. overload |
10 bar abs., 16 bar abs. with CERT31P
|
| Materials in contact with vacuum |
Stainless steel 1.4307, tungsten, nickel, glass
|
| Accuracy |
1000 – 20 mbar: ca. 30 % f. r. | 20 – 0.002 mbar: 10 % f. r.
|
| Repeatability |
20 – 0.002 mbar: 2 % f. r.
|
| Response time |
200 ms
|
| Voltage supply |
15 – 30 VDC
|
| Electrical connection |
Type Hirschmann, 6pin, male, lockable
|
| Power consumption |
Max. 1 W with 24 VDC supply voltage
|
| Operating temperature |
+5…+60 °C
|
| Storage temperature |
-20…+70 °C
|
| Bake out temperature |
Max. 150°C at the flange (transducer separated from voltage supply)
|
| Output signal |
0-10 V
|
| Article Number (choice of vacuum connection): |
DN 16 CF (VSP64MV), DN 16 ISO-KF (VSP63MV)
|
| Dimensions |
66 x 30 x 30 mm
|
| Protection class |
IP40
|
| Weight |
135 g (DN 16 CF), 98 g (DN16 ISO-KF)
|