|
Micro pressure (Differential pressure) |
Gauge pressure |
| Accuracy |
±0.3% of F.S. ±1 digit |
±0.25% of F.S. ±1 digit |
| Temperature characteristic (Zero) |
±0.03% of F.S./℃ |
| Temperature characteristics (Span) |
±0.03% of F.S./℃ |
| Pressure media |
Noncorrosive gases |
Noncorrosive gases and liquid compatible with SUS630 |
| Transducer type |
Inductance type |
Capacitance type |
| Sensing element |
Beryllium copper |
SUS630 |
| Allowable pressure |
Ranges 50 kPa or lower: 10 times of F.S |
Ranges 5 MPa or lower: 2 times of F.S |
| Ranges 100 kPa or higher: 5 times of F.S |
Ranges 10 MPa or higher: 1.5 times of F.S. Range |
| Response time (Step response) |
300ms or lower/99％ of F.S. |
30ms or lower/99％ of F.S. |
| Sensor Internal Volume |
HI: 8.3 mL LO: 9.8 mL |
Approx. 3.5 mL |
| Documents |
Traceability documents, Operation manual |