Thiết bị đo phân tích khí Spectris Servomex SERVOPRO DF-760E ULTRA
Delivering a compact integrated solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E ULTRA is an analyzer designed for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.
Combining the industry-leading properties of Servomex’s non-depleting Coulometric sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E ULTRA measures ultra-low contaminant levels of H2O and O2 within background gas blends of nitrogen (N2), hydrogen (H2), helium (He), O2 and argon (Ar) (H2O in O2 only).