| Type |
Measurement range Repeat accuracy |
Repeat
accuracy |
Linearity |
Light source
(JIS laser class) |
Model |
Transparent object/
specular object measurement |
Narrow |
 |
0.37 μm |
±0.08%
F.S. |
Red
semiconductor
laser
(Class 1) |
CD5-L25A |
| Wide |
CD5-LW25A |
| Short range |
Narrow |
 |
Diffuse mode
0.46 μm
Specular mode
0.23 μm |
±0.08%
F.S. |
Red
semiconductor
laser
(Class 2) |
CD5-30A |
| Wide |
CD5-W30A |
Middle
range |
Narrow |
 |
Diffuse mode
1 μm
Specular mode
0.5 μm |
Diffuse mode
±0.05% F.S.
Specular mode
±0.08% F.S. |
Red
semiconductor
laser
(Class 2) |
CD5-85 |
| Wide |
CD5-W85 |
Semi-long
range |
Narrow |
 |
2 μm |
±0.05%
F.S. |
Red
semiconductor
laser
(Class 2) |
CD5-150 |
| Wide |
CD5-W150 |
| Long range |
Wide |
 |
5 μm |
±0.08%
F.S. |
Red
semiconductor
laser
(Class 2) |
CD5-W350 |
Super long
range |
Wide |
 |
10 μm |
±0.08%
F.S. |
Red
semiconductor
laser
(Class 2) |
CD5-W500 |
| Ultra long rang |
Wide |
 |
30 μm |
±0.1%
F.S. |
Red
semiconductor
laser
(Class 3R) |
CD5-W2000 |