| Model |
Standard |
Gas purge type |
Insertion type |
| Nominal size |
Wafer type |
20 to 150mm |
15 to 150mm |
— |
| Flange type |
200 to 500mm |
50 to 500mm |
— |
| Applicable tube size |
— |
— |
200 to 2000mm |
Flow
range |
Gas (0.2 MPa air) |
3 to 19000m3/h
(12 types) |
21 to 19000m3/h
(9 types) |
72 to 67800m3/h
(10 types) |
| Operating temp. range |
–30 to +130°C
(Depends on body material.) |
For room temperature:
–30 to +130°C |
–30 to +130°C
(350°C max. for exhaust gas) |
For high temperature:
350°C max. |
For low temperature:
–200°C min. |
| Flange standard |
JIS 10, 20, 30K
ASME 150,300 |
JIS 10K |
JIS 10, 20K
ASME 150 |
| Max. operating pressure |
Depends on flange standard. |
0.971MPa |
3.04MPa
(Depends on flange standard.) |
| Accuracy |
±1% of reading or ±1% of full scale |
±2% of full scale |
| Applicable fluids |
Gas |
| Power supply |
DC-powered |
| Configuration |
Explosionproof or non-explosionproof, IP65 or equivalent |
| Output |
Pulse
|