| MEASURING RANGES |
|
| Air/Full scale freely selectable |
Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM)
Body size ½” from 0 … 60 ln/min to 0 … 450 ln/min (from 0 … 65 SLPM to 0 … 480 SLPM) |
| INSTRUMENT VERSIONS |
|
“Standard”
The economic solution |
Accuracy: ± 1.0% of full scale*
Turndown ratio: 1 : 50 |
“Hi-Performance”
With highest accuracy and turndown ratio
(available for GSM < 200 ln/min (200 SLPM) /
GSC < 150 ln/min (150 SLPM) (air)) |
Accuracy: ± 0.3% of full scale + ± 0.5% of reading*
Turndown ratio: 1 : 100
*An additional error of ±0.25% may apply for analogue signals |
| PERFORMANCE DATA |
|
| Media (real gas calibration) |
Air*, O2*, N2, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request)
*O2 & N2 are calibrated with air |
| Response time |
Meter (GSM): ± 80ms*; Controller (GSC): ± 500ms*
*depending on device configuration & according to SEMI standard E17-1011,
5-100% of range under optimized conditions |
| Repeatability |
± 0.2% of full scale (according to SEMI standard E56-0309) |
| Longterm stability |
< 1% of measured value / year |
| Power supply |
24 Vdc (18 – 30 Vdc), 15 Vdc on request |
| Current consumption Standard |
Meter (GSM): max. 100 mA; Controller (GSC): max. 250 mA
(GSC with valve type 8 max. 490mA) |
| Current consumption Profinet RT / EtherCAT |
Meter (GSM): max. 125 mA; Controller (GSC): max. 340 mA
(GSC with valve type 8 max. 560mA) |