Thiết bị đo phân tích khí Spectris Servomex SERVOPRO NanoChrome ULTRA
A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the NanoChrome ULTRA offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range of common background gases including Ar, H2, helium (He), N2 and oxygen (O2).
Updated with a larger display and the latest software, the NanoChrome ULTRA uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex.