| Filtration Accuracy |
0.003μm(however, it is 0.1μm at purified water filtration) |
| Recommended Flow Rate |
10 to 200ℓ/min(refer to flow rate characteristic curve for each model) |
| Max. Operating Pressure |
17MPa (2,465PSIG) at20℃ |
| Max. Allowable Differential Pressure |
9.6MPa (1,392PSIG) at20℃ |
| Max. Continuous Operating Temperature |
120℃ |
| Baking Temperature |
200℃ |
| External Leakage Amount |
2×10-11Pa・m3/sec or less |
| Materials |
Housing:SUS316L Roughness:Rmax0.7μm or less Element: Alumina ceramics (Al2O3) Seal: PTFE |
| Joint |
1/4",3/8",1/2",3/4" Gasket seal, Compression seal ,and others |