Standard field of view: ( 0.49*0.49 ) mm
Max field of view: ( 6x6 ) mm
Reflectivity of test object:0.5 % ~100 %
Repeatability of Roughness RMS:0.005nm
Scanning range:≤10mm
Resolution:0.1nm
Accuracy of stage measurement:0.75 %
Repeatability of stage measurement: 0.1% 1σ
X, Y Object table :
Size: ( 320x200 ) mm
Moving range: ( 140x110 ) mm
Load capacity:10kg
Control method:Motorized