| Item No |
SJ5701 |
| Profile measurement: |
| (1) X-axis |
| Measuring range |
(0~200)mm |
| Indication error |
±(0.8+2L/100)µm,
L is horizontal measured length in mm |
| Resolution |
0.01μm |
| Strightness |
2μm/200mm |
| Scanning speed |
(0.05~5)mm/s |
| Moving speed |
(0~10)mm/s |
| (2) Z0-axis |
| Measuring range |
±25mm |
| Indication error |
±(1.5+|2H|/100)µm
H is vertical measured height in mm |
| Resolution |
0.01μm |
| (3) Z-axis |
| Measuring range |
(0~450)mm |
| Moving speed |
(0~10)mm/s |
| (4) Measuring force |
(10~150)mN |
| (5) Max gradient |
uphill 77 º / downhill 83º |
| (6) Object table |
Rotation angle: 360º; X, Y movement: 15mm |
| (7) Dimension & weight |
Marble base: 800×450×100mm
Overall:(850×500×1000)mm
150kg |
| (8) Operating environment |
No strong magnetic field, no vibration, no corrosive gas;
Operating temperature: 20 ± 2℃; Relative humidity: 40-60%
|
| Roughness measurement: |
| (1) Basic parameters |
| Measuring range |
X: 200mm; Z1:±80µm /±40µm /±20µm |
| Error of strightness |
≤0.15µm/20mm, ≤0.5µm/200mm |
| Indication error |
±5% |
| Resolution |
Z1: 0.01µm(±800µm), 0.004µm(±80µm), 0.002µm(±40µm), 0.001µm(±20µm), |
| Scanning speed |
0.5 mm/s, 0.1 mm/s or 0.05 mm/s adjustable |