| Model | VMM-1510D | VMM-2010D | VMM-2515D | VMM-3020D | VMM-4030D | 
        
            | Stage  Size (mm) | 354 x 228 | 404 x 228 | 450 x 280 | 500 x 330 | 606 x 466 | 
        
            | Glass Size (mm) | 210 x 160 | 260 x 160 | 306 x 196 | 350 x 280 | 450 x 350 | 
        
            | X/Y Travel (mm) | 150 x 100 | 200 x 100 | 250 x 150 | 300 x 200 | 400 x 300 | 
        
            | Weight(kg) | 100 | 110 | 120 | 140 | 240 | 
        
            | Dimensions (mm) | 540 x 560 x 860 | 760 x 600 x 900 | 970 x 670 x 940 | 
        
            | Z axis travel (mm) | 150 mm | 
        
            | Z working range (mm) | VMM-D series: 105 mm    Optional Lens: 92 mm                       | 
        
            | Accuracy |  ≤ ( 3 + L/75 )μm ;    L: measuring length (mm) | 
        
            | Digital Display & Resolution of X/Y/Z-axis | Digital Display : 3M DRO (Optional) Resolution : 0.0005 mm | 
        
            | Measuring Software | QMS3D-M, TAIWAN MADE. | 
        
            | Video System | VMM-D series | 
        
            | 
                CCD Camera:Colour 1/3“ CCD  CameraZoom Lens :  Standard Zoom Lens,            Magnification of field lens  0.7X - 4.5X            Total Magnifications            40X - 255X            Object  View                        7mm - 1.1mm | 
        
            | OPTIONAL | 
        
            | 
 
                CCD Camera:Colour 1/2“ CCD  CameraZoom Lens :  Standard Zoom Lens, (NAVITAR is optional lens)            Magnification of field lens  0.7X - 4.5X            Total Magnifications            30X - 190X            Object  View                        10.6mm - 1.6mm | 
        
            | Lightening System | Adjustable LED Surface and Transmission illumination | 
        
            | Power Supply | AC220V/110V    50/60 Hz |